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What are the pros and cons of using semiconductors for switching RF?

Semiconductors can be used to switch up to 100 GHz.  Cost becomes very high over 10 GHz.  Semiconductors represent the smallest size when compared to the other technologies.  Its frequency response has discontinuities.  They have inter modular distortion and need added circuitry to control.  They also need added circuitry to improve its frequency response.

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